In semiconductor lithography, the Rayleigh criterion for resolution determines just how small the transistors on a microchip can be.| ASML
ASML’s lithography machines feature some of the world’s most advanced, precision-engineered mechanical and mechatronic systems.| ASML
ASML systems rely on data from sensors as well as diffraction-based and electron beam measurements to optimize chip production.| ASML
The complex optical systems in ASML’s lithography machines reduce the image to be printed on a wafer to the nanometer level.| ASML