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Intel CFO confirms that 14A will be more expensive than 18A due to High-NA EUV tool — Intel expects 14A process to offer 15-20% better performance-per-watt...
https://www.tomshardware.com/tech-industry/semiconductors/intel-cfo-confirms-that-14a-will-be-more-expensive-to-use-than-18a-intel-expects-14a-fabrication-process-to-offer-15-20-percent-better-performance-per-watt-or-25-35-percent-lower-power-consumption-compared-to-18a
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Intel's 14A process, designed for both internal and foundry use, will be significantly more expensive than 18A due to its reliance on ASML's $380 million High-NA EUV tools.