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VLSI to explore vertical device changes and 3nm finFET
https://www.techdesignforums.com/blog/2024/05/02/vlsi-backside-cfet-3nm-finfet/
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monolithic 3dic
backside power delivery
finfet
3nm
power analysis
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The upcoming VLSI Symposium will examine progress in using backside contacts and 3D structures to improve density and speed as well as continuing improvements to finFET processes.