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VLSI to explore vertical device changes and 3nm finFET
https://www.techdesignforums.com/blog/2024/05/02/vlsi-backside-cfet-3nm-finfet/
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monolithic 3dic
backside power delivery
finfet
3nm
power analysis
The upcoming VLSI Symposium will examine progress in using backside contacts and 3D structures to improve density and speed as well as continuing improvements to finFET processes.
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